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MCL 提示/傾斜、旋轉(zhuǎn)納米位移臺Align3 系列
- 品牌：MCL Think Nano
- 型號： Nano-Align3 Series
- 產(chǎn)地：美洲 美國
- 供應(yīng)商報價：面議
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北京歐蘭科技發(fā)展有限公司
更新時間：2022-03-04 17:31:39 -
銷售范圍售全國
入駐年限第10年
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詳細介紹
Features Low profile: 0.8"
Three axis motion (Z θX θY)
Large center aperture: 2.6" x 2.6"
Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θXθY)
Closed loop control
Typical Applications Z-axis plus tip/tilt alignment
Nanolithography
Microscopy
MEMS
Product DescriptionThe Nano-Align3 is a three axis (Z, θX , θY) nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ? technology provide picometer and nanoradian precision under closed loop control.
Technical Specifications
Ranges of motion (Nano-Align3-100) Z axis 100 μm θX and θY 2 mradian Ranges of motion (Nano-Align3-200) Z axis 200 μm θX and θY 4 mradian Resolution (Nano-Align3-100) 0.2nm/ 4 nradian Resolution (Nano-Align3-200) 0.4nm/ 8 nradian Resonant Frequency (Nano-Align3-100) 600 Hz ±20% Resonant Frequency (Nano-Align3-200) 450 Hz ±20% Stiffness 1.0 N/μm Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Aluminum, Titanium, or Invar Controller Nano-Drive?/Nano-Drive?85 * Larger load requirements should be discussed with our engineering staff. Additional Information
Nano-Align3 Series Drawing 
Nano-Align3 Series Catalog Pages 
Related ProductsNano-Align5 Series
Nano-Align6 Series
Nano-Man5
Nano-M3Z
Nano-ZS Series
Accessories
Nano-Drive?
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